Amtech Sys Inc

CUSIP 032332504COM PAR $0.01NASYSQ1 2026

13D / 13G Filings

Schedule 13D/13G on record

Beneficial Filers

Distinct reporting persons

Largest Stake

20.2%

Max % of class reported

Institutional Holders

13F filers (latest quarter)

34 filings · latest Feb 13, 2026

#	Filed	Reporting Person	Form	% of Class	Shares	Filing
1	Feb 13, 2026	Wax Asset Management, LLC	13G/A	9.2%	1.32M	SEC
2	Jan 21, 2026	Dimensional Fund Advisors LP	13G/A	4.7%	672.1K	SEC
3	Apr 4, 2025	Royce &Amp; Associates LP	13G/A	4.1%	588.0K	SEC
4	Feb 18, 2025	Piton Capital Partners LLC	13D/A	20.2%	—	SEC
5	Feb 12, 2025	Pacific Ridge Capital Partners, LLC	13G/A	4.6%	652.4K	SEC
6	Feb 11, 2025	Wax Asset Management, LLC	13G/A	15.8%	2.26M	SEC
7	Jan 28, 2025	Royce &Amp; Associates LP	13G/A	10.4%	1.48M	SEC
8	Nov 12, 2024	First Eagle Investment Management, LLC	13G	5.5%	783.4K	SEC
9	Oct 31, 2024	Dimensional Fund Advisors LP	13G/A	6.5%	924.1K	SEC
10	Oct 15, 2024	Royce & Associates LP	13G/A	12.0%	1.71M	SEC

See the full Schedule 13D/13G history for Amtech Sys Inc.

Largest reported positions · latest quarter

#	Fund	Shares	Value
1	First Eagle Investment Management, LLC	832.5K	$9.72M
2	Dimensional Fund Advisors LP	529.4K	$6.18M
3	Millennium Management LLC	453.6K	$5.30M
4	Marshall Wace, LLP	417.1K	$4.87M
5	Pacific Ridge Capital Partners, LLC	405.4K	$4.73M
6	Arrowstreet Capital, Limited Partnership	365.4K	$4.27M
7	Jane Street Group, LLC	340.9K	$3.98M
8	Two Sigma Investments, LP	266.9K	$3.12M
9	Connor, Clark & Lunn Investment Management Ltd.	174.2K	$2.03M
10	Trexquant Investment LP	173.9K	$2.03M